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A MICRO/NANO SENSORS & SYSTEMS COMPANY
|   Wafer Aligners Single/Double Sided Proximity Printing Chuck on Shock Table; (1 µm Resolution)   |

|   Currently configured for 3" wafers using 4” square mask plates   |
|   (Can be reconfigured for 4” wafers)  |
   (Sale Unit SU71-12)   


CONDITION

Well maintained Fully Operating Semiconductor Wafer aligners. Both aligners are on a MEMS Research Lab floor. Each is mounted on its shock table under its respective HEPA Filter Hood. Refurbished and Customized by Seller.

Aligner # 1:

  CONFIGURATION OF THIS ALIGNER INCLUDE
  (This unit is dedicated to Negative Photoresist Coated wafers)
  Base unit Kasper Model 2001-C
   Conventional 4" Glass Mask Holder
   Proximity Printing Chuck
   Shock Table
   Binocular Microscope
   IR Electrophysics Camera Model 7290
   350 W UV lamp & P/S
   HEPA Filter Covering Hood

  This unit is CUSTOMIZED FOR
  Single Sided Photolithography
       Conventional lithography for alignment with respect to a pattern on top side of the wafer;
       A Binocular Microscope is mounted on the Aligner
  Double Sided Photolithography
       In this lithography pattern on the wafer top side is aligned with respect to a pattern on bottom side of the wafer;
       An IR Camera is mounted on the Aligner
  Wafer-to-Wafer Alignment
       In this two wafers with pattern, facing each other are aligned with respect to each other;
       A Binocular Microscope is mounted on the Aligner
       A custom fixture with vacuum hold keeps the upper wafer (with pattern facing down)in the place of a conventional mask



Aligner # 2:

  CONFIGURATION OF THIS ALIGNER INCLUDE
  (This unit is dedicated to Positive Photoresist Coated wafers)
  Base unit Kasper Model 2001-C
   Conventional 4" Glass Mask Holder
   Can also hold 4" flexible polyester mask (Black and White) films
   Proximity Printing Chuck
   Shock Table
   Binocular Microscope
   The Aligner # 1 IR Electrophysics Camera Model 7290 can also be used
   350 W UV lamp & P/S
   HEPA Filter Covering Hood

  This unit is CUSTOMIZED FOR
  Single Sided Photolithography
       Conventional lithography for alignment with respect to a pattern on top side of the wafer;
       A Binocular Microscope is mounted on the Aligner
  Optional Double Sided Photolithography
       In this lithography pattern on the wafer top side is aligned with respect to a pattern on bottom side of the wafer;
       An IR Camera is mounted on the Aligner
  Optional Wafer-to-Wafer Alignment
       In this two wafers with pattern, facing each other are aligned with respect to each other;
       A Binocular Microscope is mounted on the Aligner
       A custom fixture with vacuum hold keeps the upper wafer (with pattern facing down)in the place of a conventional mask

Description

Aligners are ideal for R&D and small lot production work.

Perfect for a startup or university with technical staff skills to take some technical responsibility and save money over buying new.

Both aligners are fully operational.

Spares: (separately priced)

   A Oriel/Newport 350 W UV lamp & P/S
   Two Backup Power Supplies for UV lamps
   Assorted parts for maintaining Kasper 2001

Aligners are available for inspection by appointments

Pricing negotiable. Make Offers.

EQUIPMENT PHOTOS

Aligner # 1

Aligner with IR Camera

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Aligner with Binocular Microscope

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Arm Raised View

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Mask Holder with Switches

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Mask Holder with Mask in Place

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Front View with Arm Raised

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Front View Arm Raised

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Mask Holder with Iron Oxide Mask

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Front View with wafer-to-wafer alignmnet control box placed on the Monitor View 1

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Front View with wafer-to-wafer alignmnet control box placed on the Monitor View 2

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HEPA Filter Hood

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Kasper 2001 Manual

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Aligner # 2

Aligner with Binocular Microscope View 1

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Aligner with Binocular Microscope View 2

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Aligner with Headway Research Spin Coater View 1

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Aligner with Headway Research Spin Coater View 2

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Aligner with Two Compressed Air Regulators

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