As the equipment involved is one of kind, the operational electronics and software are internally developed. In legacy applications, the parallel port (or SCSI bus) or RS232 serial ports were used, and the port control and GUI were written in BASIC. In current applications, the USB interface is commonly used, and driver software is written in Python. Examples where such software is used are:

Laser trimming stage electronics and laser firing switch are controlled by a lap top via a USB port. The drive module is written in Python.

Furnace mass flow controls and sequencer switching are controlled by a laptop via a USB port

  Photoresist spray station controller electronics (3 stepper motors, 1 DC motor and 4 switches) is driven by a laptop parallel port