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SENSOR DEFINED

A device that detects (senses) a change in a physical stimulus (such as motion, heat, light, sound, pressure, magnetism, radiation level, or a chemical property) and transmits a signal (mostly electrical or optical) for a measurement (display) or a control (action).

EXAMPLES

Accelerometer

SINGLE

A block diagram representation of the WISA accelerometer is shown in the the above figure. An acceleration input normal to the proof mass produces a voltage output proportional to the input acceleration.

Micro-Sensing Assembly

iNTEG

The above figure shows the block diagram of a micro-sensor assembly (MSA), which is a part of ANDAS remote node. This device is cemented to the skin of an air vehicle, where it senses normal acceleration, pressure, temperature, strains along three direction 45 degrees apart on the surface of the skin.

WADDAN SENSOR LISTING (PARTIAL)

SENSOR TYPE FAB PROCESS TYPE DESCRIPTION
Accelerometer Bulk Micro-machined in (100) S Closed Loop Capacitive Pickoff and Electrostatic Forcing
 
(Navigational System Applications)
Hydrophone Bulk Micro-machined in (100) S Piezoelectric Sensor of Doublet Construction
(For Towed Array & High Directivity Applications)
G-Hardened Multi-sensor Coriolis Accel Bulk Micro-machined in (110) Si Closed Loop Capacitive Pickoff and Electrostatic Forcing  
(Survives 25,000  G shocks)
High Accuracy Multi-Sensor  Coriolis Accel Bulk Micro-machined in (110) Si Closed Loop Capacitive Pickoff and Electrostatic Forcing 
(Survives 2,500 G shocks)
Accelerometer Surface Micro-machined 3 lyr PolySi Closed Loop Capacitive Pickoff and Electrostatic Forcing
Digital Accelerometer Surface Micro-machined 3 lyr PolySi Open Loop  Step Switches
Dual Gimbal Gyro Single-Axis (Gyroscopic)
Surface Micro-machined 3 lyr PolySi Closed Loop Capacitive Pickoff and Electrostatic Torquing
Dynamically Tuned Dual Gimbal Gyro (Gyroscopic) Bulk Micro-machined in (100) Si Laser Trimmed Tuning Closed Loop Capacitive Pickoff and Electrostatic Torquing
Dynamically Tuned Dual Gimbal Gyro (Gyroscopic) Bulk Micro-machined in (110) Si Laser Trimmed Tuning Closed Loop Capacitive Pickoff and Electrostatic Torquing
High-G Accelerometer Bulk Micro-machined in (100) Si Open Loop Piezoresistive Bridge Measurements
Accelerometer Micromolded Sens Structure in Nickel Closed Loop Tunnel Diode Pickoff and Electrostatic Forcing Comb Structure
Dual Gimbel Single Axis Gyro Micromolded Sens Structure in Nickel Closed Loop Tunnel Diode Pickoff and Electrostatic Forcing  Structure
Gel Filled Waveguide Gyro Micromolded Sens Structure in Nickel Single Chip Opto-interferometric Device (Micro FOG concept)
Single CHip Hybrid FOG Flipped LiNbO3 on (100) Si Passive Fiber Optic Gyro
Six DOF Inertial Measurement Device Bulk Micro-machined in (110) Si Closed Loop Capacitive Pickoff and Electrostatic Forcing / Torquing
Six DOF Inertial Measurement Device Surface Micro-machined 3 lyr PolySi Closed Loop Capacitive Pickoff and Electrostatic Forcing / Torquing
Six DOF Integrated Inertial Measurement Device (IIMD) Micromolded Sens Structure in Nickel Closed Loop Tunnel Diode Pickoff and Electrostatic Forcing / Torquing
Six DOF Integrated Inertial Measurement Device (IIMD) Surface Micro-machined 3 lyr PolySi Closed Loop Capacitive Pickoff and Electrostatic Forcing / Torquing
Dual Gimbal Beam Steering Mirror Surface Micro-machined 3 lyr PolySi Open Loop ElectroStatic Torquing Using Push-pull Mechanism
Digitally Programmable Beam Steering Mirror Surface Micro-machined 3 lyr PolySi Open Loop ElectroStatic Torquing Switches providing step changes in angular deflection