Well maintained Fully Operating Semiconductor Wafer aligners. Both aligners are on a MEMS Research Lab floor. Each is mounted on its shock table under its respective HEPA Filter Hood. Refurbished and Customized by Seller.
CONFIGURATION OF THIS ALIGNER INCLUDE
(This unit is dedicated to Negative Photoresist Coated wafers)
Base unit Kasper Model 2001-C
Conventional 4" Glass Mask Holder
Proximity Printing Chuck
Shock Table
Binocular Microscope
IR Electrophysics Camera Model 7290
350 W UV lamp & P/S
HEPA Filter Covering Hood
This unit is CUSTOMIZED FOR
Single Sided Photolithography
Conventional lithography for alignment with respect to a pattern on top side of the wafer;
A Binocular Microscope is mounted on the Aligner
Double Sided Photolithography
In this lithography pattern on the wafer top side is aligned with respect to a pattern on bottom side of the wafer;
An IR Camera is mounted on the Aligner
Wafer-to-Wafer Alignment
In this two wafers with pattern, facing each other are aligned with respect to each other;
A Binocular Microscope is mounted on the Aligner
A custom fixture with vacuum hold keeps the upper wafer (with pattern facing down)in the place of a conventional mask
CONFIGURATION OF THIS ALIGNER INCLUDE
(This unit is dedicated to Positive Photoresist Coated wafers)
Base unit Kasper Model 2001-C
Conventional 4" Glass Mask Holder
Can also hold 4" flexible polyester mask (Black and White) films
Proximity Printing Chuck
Shock Table
Binocular Microscope
The Aligner # 1 IR Electrophysics Camera Model 7290 can also be used
350 W UV lamp & P/S
HEPA Filter Covering Hood
This unit is CUSTOMIZED FOR
Single Sided Photolithography
Conventional lithography for alignment with respect to a pattern on top side of the wafer;
A Binocular Microscope is mounted on the Aligner
Optional Double Sided Photolithography
In this lithography pattern on the wafer top side is aligned with respect to a pattern on bottom side of the wafer;
An IR Camera is mounted on the Aligner
Optional Wafer-to-Wafer Alignment
In this two wafers with pattern, facing each other are aligned with respect to each other;
A Binocular Microscope is mounted on the Aligner
A custom fixture with vacuum hold keeps the upper wafer (with pattern facing down)in the place of a conventional mask
Aligners are ideal for R&D and small lot production work.
Perfect for a startup or university with technical staff skills to take some technical responsibility
and save money over buying new.
Both aligners are fully operational.
A Oriel/Newport 350 W UV lamp & P/S
Two Backup Power Supplies for UV lamps
Assorted parts for maintaining Kasper 2001
Aligners are available for inspection by appointments
Pricing negotiable. Make Offers.
